Irradiation Hybrid materials Waveguides Laser pyrolysis Optical properties Si-rich silicon oxide IR spectroscopy GENOMIQUE Rare-earth ions Pulvérisation cathodique AFM Grazing incidence X-ray diffraction Microstructure physics Erbium Nanostructuring Cathodoluminescence Nanostructured materials Silicon nanocrystals Silicon nitride Phase transition Raman scattering M-lines Down-conversion Silicium Silicon photonics Oxides Reactive magnetron sputtering Thin films Si nanocluster Crystal structure Nanostructure Copper Rare earth Matériaux hybrides Pulvérisation magnétron radiofréquence Magnetron sputtering Microstructure Hafnium silicates Hillocks Feature erasure Pulsed laser deposition Cerium Thin film Nanostructures Conductivity FTIR CoMoS Computational electromagnetic methods Infrared absorption Hafnium silicate Quantum-well Silicon Rare earths Atom probe tomography SiC Neodymium Couches minces Photoluminescence Oxide interface HR STEM-HAADF Fluorescence Terres rares Oxygen vacancies MoS2 Energy transfer High-k dielectrics Epitaxy Terbium Silicon nanoclusters Raman Structural properties Nanoparticules Semiconductors Lifetime Citric acid Optical amplifiers Doping Sputtering Refractive index ADE-FDTD Oxide materials PZT CO adsorption Electroluminescence Luminescence Nanoparticles XRD RF magnetron sputtering Friction Microstructure physique Multilayers Films Electron paramagnetic resonance Liposomes Couches minces semi-conductrices Photovoltaic Guide d'onde Radiofrequency magnetron sputtering Waveguide Al2O3