Electret-Free Micromachined Silicon Electrostatic Vibration Energy Harvester With the Bennet's Doubler as Conditioning Circuit

Vitaly Dorzhiev 1 Armine Karami 2 Philippe Basset 3 Frédéric Marty 3 Valery Dragunov 1 Dimitri Galayko 2
1 Novosibirsk State Technical University
2 CIAN - Circuits Intégrés Numériques et Analogiques
LIP6 - Laboratoire d'Informatique de Paris 6
3 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
Abstract : This letter presents for the first time experiments combining a previously reported microelectromechanical system electrostatic vibration energy harvester (e-VEH) and the Bennet's doubler circuit. A self-limiting effect on the harvested power, which was not reported before on macroscopic e-VEHs, has been observed. This effect is due to the nonlinear dynamics of the system and to the self-increase of the electromechanical damping that is typical for e-VEHs. With a few volts of initial precharge, the Bennet's doubler progressively increases the voltage across the transducer's terminals up to 23 V, where saturation occurs. A power of 2.3 µW is available for a load, when the harvester is excited by 1.5 g at 150 Hz of external acceleration.
Keywords : Energy harvesting electrostatic transduction MEMS Bennet's doubler
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Vitaly Dorzhiev, Armine Karami, Philippe Basset, Frédéric Marty, Valery Dragunov, et al.. Electret-Free Micromachined Silicon Electrostatic Vibration Energy Harvester With the Bennet's Doubler as Conditioning Circuit. IEEE Electron Device Letters, Institute of Electrical and Electronics Engineers, 2015, 36 (2), pp.183-185. ⟨10.1109/LED.2014.2387213⟩. ⟨hal-01232671⟩

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