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Journal Articles Surface and Interface Analysis Year : 2021

Study of Buried Interfaces in Fe/Si Multilayer by hard X-ray emission spectroscopy

Abstract

Hard x-ray emission spectroscopy (XES) has been used to study buried layers and interfaces in a Fe/Si periodic multilayer. Until now, buried layers could be studied using the XES in the soft x-ray range. Here we extend the methodology to study the buried interfaces in hard x-ray region (photon energy ≥ 5 keV). We report the formation of FeSi2 at all the interfaces with thicknesses of 1.4 nm. X-ray reflectivity measurements enable us to deduce the structure and thickness of the multilayer stack, thereby confirming the presence of FeSi2.
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Dates and versions

hal-03428877 , version 1 (15-11-2021)

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Hina Verma, Karine Le Guen, Renaud Delaunay, Iyas Ismail, Vita Ilakovac, et al.. Study of Buried Interfaces in Fe/Si Multilayer by hard X-ray emission spectroscopy. Surface and Interface Analysis, 2021, 53 (12), pp.1043-1047. ⟨10.1002/sia.7005⟩. ⟨hal-03428877⟩
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