Study of Buried Interfaces in Fe/Si Multilayer by hard X-ray emission spectroscopy

Hard x-ray emission spectroscopy (XES) has been used to study buried layers and interfaces in a Fe/Si periodic multilayer. Until now, buried layers could be studied using the XES in the soft x-ray range. Here we extend the methodology to study the buried interfaces in hard x-ray region (photon energy ≥ 5 keV). We report the formation of FeSi2 at all the interfaces with thicknesses of 1.4 nm. X-ray reflectivity measurements enable us to deduce the structure and thickness of the multilayer stack, thereby confirming the presence of FeSi2.

Mots clés

X-ray emission spectroscopy Buried interfaces Multilayer

Domaines

Chimie-Physique [physics.chem-ph]

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Verma et al. - Study of buried interfaces in FeSi multilayer by .pdf (348.29 Ko)

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https://hal.sorbonne-universite.fr/hal-03428877

Soumis le : lundi 15 novembre 2021-12:51:20

Dernière modification le : jeudi 11 avril 2024-13:08:15

Archivage à long terme le : mercredi 16 février 2022-20:30:04

Dates et versions

hal-03428877 , version 1 (15-11-2021)

Identifiants

HAL Id : hal-03428877 , version 1
DOI : 10.1002/sia.7005

Citer

Hina Verma, Karine Le Guen, Renaud Delaunay, Iyas Ismail, Vita Ilakovac, et al.. Study of Buried Interfaces in Fe/Si Multilayer by hard X-ray emission spectroscopy. Surface and Interface Analysis, 2021, 53 (12), pp.1043-1047. ⟨10.1002/sia.7005⟩. ⟨hal-03428877⟩

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