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RF impedance measurements of DC atmospheric micro-discharges

Abstract : The available diagnostics for atmospheric micro-plasmas remain limited and relatively complex to implement; so we present a radio-frequency technique for diagnosing a key parameter here. The technique allows one to estimate the dependencies of the electron density by measuring the RF-impedance of the micro-plasma and analyzing it with an appropriate equivalent circuit. This technique is inexpensive, can be used in real time and gives reasonable results for argon and helium DC micro-plasmas in holes over a wide pressure range. The electron density increases linearly with current in the expected range consistent with normal glow discharge behavior.
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Submitted on : Friday, April 29, 2016 - 12:01:04 PM
Last modification on : Monday, December 13, 2021 - 9:17:12 AM
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Lawrence J. Overzet, D. Jung, Monali Mandra, Matthew Goeckner, Thierry Dufour, et al.. RF impedance measurements of DC atmospheric micro-discharges. The European Physical Journal D : Atomic, molecular, optical and plasma physics, EDP Sciences, 2010, 60, pp.449-454. ⟨10.1140/epjd/e2010-00274-5⟩. ⟨hal-01303158⟩



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