Contributed Review: Quartz force sensing probes for micro-applications - Sorbonne Université Access content directly
Journal Articles Review of Scientific Instruments Year : 2016

Contributed Review: Quartz force sensing probes for micro-applications

Abstract

As self-sensing and self-exciting probes, quartz sensors present many advantages over silicon cantilevers for microscopy, micro-robotics, and other micro-applications. Their development and use is further bolstered by the fact that they can be manufactured from common quartz components. This paper therefore reviews applications of the increasingly popular quartz tuning fork probes as force sensors in the literature and examines the options for higher-frequency quartz probes using the other available types of flexional, thickness-shear or length-extensional resonators.
Fichier principal
Vignette du fichier
Abrahamians_2016_Contributed_Review.pdf (6.28 Mo) Télécharger le fichier
Origin Publisher files allowed on an open archive
Loading...

Dates and versions

hal-01376573 , version 1 (05-10-2016)

Identifiers

Cite

Jean-Ochin Abrahamians, Laurent Pham Van, Stéphane Régnier. Contributed Review: Quartz force sensing probes for micro-applications. Review of Scientific Instruments, 2016, 87 (7), pp.071502. ⟨10.1063/1.4958896⟩. ⟨hal-01376573⟩
120 View
291 Download

Altmetric

Share

Gmail Mastodon Facebook X LinkedIn More