Investigation of ZrC/Al interfaces in a Al/ZrC/Al/W waveguide-like structure by soft X-ray reflectivity technique - Sorbonne Université Access content directly
Journal Articles Journal of Electron Spectroscopy and Related Phenomena Year : 2017

Investigation of ZrC/Al interfaces in a Al/ZrC/Al/W waveguide-like structure by soft X-ray reflectivity technique

Abstract

ZrC/Al multilayer is found suitable for soft x-ray/EUV region near the Al L absorption edge. Intermixing of Al at the interfaces is a serious problem in order to achieve the calculated reflectivity performances from an experimentally grown multilayer. In this study our aim is to investigate the ZrC/Al interfaces by making a waveguide structure as Al/ZrC/Al/W. We used soft x-ray reflectivity (SXR) technique to study the x-ray waveguide structure composed of 4 layers on Si substrate. Structural parameters of the stacks, density, thickness and roughness of the layers, are determined through fitting of SXR data.
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Dates and versions

hal-01510687 , version 1 (19-04-2017)

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Amol Singh, Mohammed H. Modi, Philippe Jonnard, Karine Le Guen, Jean-Michel André. Investigation of ZrC/Al interfaces in a Al/ZrC/Al/W waveguide-like structure by soft X-ray reflectivity technique. Journal of Electron Spectroscopy and Related Phenomena, 2017, ⟨10.1016/j.elspec.2017.03.002⟩. ⟨hal-01510687⟩
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