Evolution of interfacial structure of Co-based periodic multilayers upon annealing

Abstract : The evolution upon annealing from room temperature to 600 °C of the microstructure of Co/Mo2C/Y and Co/Y/Mo2C multilayer stacks has been studied by transmission electron microscopy combining HAADF-STEM, EDX and HRTEM. Both kinds of samples show significant amount of intermixing even in the as-deposited state. The mixing further increases upon annealing. Most of the mixing occurs between the Co and the Mo elements, the Y layers staying comparatively preserved. After annealing at 600 °C a surprising sharpening of the interfaces is observed. It is ascribed to the formation of Co-Mo compounds. Combining these analyses with the results we have already published, we can explain in a consistent way the evolution of the x-ray reflectivity measurements of the samples upon annealing. Understanding the evolution the optical properties of such stacks designed to work in the soft x-ray range is essential for improving the optical performance of multilayer structures.
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Surf. Coat. Technol. 352, 508 ...
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Yanyan Yuan, Karine Le Guen, Christian Mény, Corinne Bouillet, Jingtao Zhu, et al.. Evolution of interfacial structure of Co-based periodic multilayers upon annealing. Surface and Coatings Technology, Elsevier, 2018, 352, pp.508 - 512. ⟨10.1016/j.surfcoat.2018.08.054⟩. ⟨hal-01876410⟩

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