Deep X-ray lithography on “sol–gel” processed noble metal mesoarchitectured films - Sorbonne Université Access content directly
Journal Articles Nanoscale Year : 2022

Deep X-ray lithography on “sol–gel” processed noble metal mesoarchitectured films

Benedetta Marmiroli
Francois Chancerel
  • Function : Author
Philippe Decorse
  • Function : Author
Heinz Amenitsch
  • Function : Author
Jennifer Peron
Andrea Cattoni

Abstract

Noble metal coordination xerogel exhibit solubility switch when exposed to X-rays. The films can be used as recyclable negative tone resists for deep X-ray lithography that can be converted into metallic nanoarchitectured films.
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Dates and versions

hal-03646702 , version 1 (19-04-2022)

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Maxime Gayrard, Benedetta Marmiroli, Francois Chancerel, Philippe Decorse, Heinz Amenitsch, et al.. Deep X-ray lithography on “sol–gel” processed noble metal mesoarchitectured films. Nanoscale, 2022, 14 (5), pp.1706-1712. ⟨10.1039/D1NR07455E⟩. ⟨hal-03646702⟩
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