Deep X-ray lithography on “sol–gel” processed noble metal mesoarchitectured films
Abstract
Noble metal coordination xerogel exhibit solubility switch when exposed to X-rays. The films can be used as recyclable negative tone resists for deep X-ray lithography that can be converted into metallic nanoarchitectured films.
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Chemical Sciences
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revised Nanoscale DXRL noble metals without highlights_compressed.pdf (817.55 Ko)
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