Thickness Dependence of Crack Initiation and Propagation in Piezoelectric Microelectromechanical Stacks - Sorbonne Université
Journal Articles Acta Materialia Year : 2020

Thickness Dependence of Crack Initiation and Propagation in Piezoelectric Microelectromechanical Stacks

Dominique Leguillon
Institut Jean Le Rond d'Alembert
Kathleen Coleman
  • Function : Author
Raúl Bermejo
  • Function : Author
  • PersonId : 873187
Suzan Trolier-Mckinstry
  • Function : Author

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Physics [physics]

Dominique Leguillon  : Connect in order to contact the contributor

https://hal.sorbonne-universite.fr/hal-03821944

Submitted on : Thursday, October 20, 2022-9:24:55 AM

Last modification on : Wednesday, September 20, 2023-10:00:04 AM

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hal-03821944 , version 1 (20-10-2022)

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  • HAL Id : hal-03821944 , version 1

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Dominique Leguillon, Kathleen Coleman, Raúl Bermejo, Suzan Trolier-Mckinstry. Thickness Dependence of Crack Initiation and Propagation in Piezoelectric Microelectromechanical Stacks. Acta Materialia, 2020. ⟨hal-03821944⟩

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