Analysis of the effects of substrate temperature, concentration of tin chloride and nature of dopants on the structural and electrical properties of sprayed SnO2 films - Sorbonne Université Accéder directement au contenu
Article Dans Une Revue Journal of Materials Science Année : 1994

Analysis of the effects of substrate temperature, concentration of tin chloride and nature of dopants on the structural and electrical properties of sprayed SnO2 films

Résumé

The correlations between structural and electrical properties of sprayed SnO2 films have been investigated as a function of substrate temperature (380–560 °C), concentration of tin precursor (0.02–0.8 M SnCl4) and the nature of the doping agent (chlorine, fluorine, antimony). High-resolution transmission electron microscopy has shown that chlorine or fluorine incorporation promotes the same type of defects, which are <0 1 1> twins. These latter behave as neutral defects, the density of which limits the carrier mobility of degenerated fluorine- or chlorine-doped films to around 20 cm2 V−1 s−1. The situation is totally different with antimony. Below the solubility limit in the SnO2 lattice (3%–4% Sb/Sn), Sn4+ are substituted by Sb5+, creating two conduction electrons per site and acting as point-charged defects which lower carrier mobility. Above this limit, the Sb3+ and Sb5+ forms coexist and are associated with an extremely large concentration of structural defects, especially twins induced by the Sb3+ species. These ions enter two-dimensional arrangements on both sides of the twins, making them planar charged defects.

Domaines

Chimie

Dates et versions

hal-04492186 , version 1 (06-03-2024)

Identifiants

Citer

A. Messad, Janine Bruneaux, Hubert Cachet, Michel Froment. Analysis of the effects of substrate temperature, concentration of tin chloride and nature of dopants on the structural and electrical properties of sprayed SnO2 films. Journal of Materials Science, 1994, 29 (19), pp.5095-5103. ⟨10.1007/BF01151102⟩. ⟨hal-04492186⟩
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