The Mechanism of the Anodic Oxidation of Silicon in Acidic Fluoride Solutions Revisited - Sorbonne Université
Article Dans Une Revue Berichte der Bunsengesellschaft für physikalische Chemie Année : 1993

The Mechanism of the Anodic Oxidation of Silicon in Acidic Fluoride Solutions Revisited

Résumé

The present experience of the electrochemical dissolution of silicon and previous assumptions upon the mechanism are briefly reviewed. A new model is developed which explains how the coverage of the surface by hydrogen can be maintained in spite of the continuous anodic dissolution.

Dates et versions

hal-04523076 , version 1 (27-03-2024)

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Citer

H. Gerischer, Philippe Allongue, V. Costa Kieling. The Mechanism of the Anodic Oxidation of Silicon in Acidic Fluoride Solutions Revisited. Berichte der Bunsengesellschaft für physikalische Chemie, 1993, 97 (6), pp.753-757. ⟨10.1002/bbpc.19930970602⟩. ⟨hal-04523076⟩
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